教師個人簡歷
現職
國立中央大學
工學院機械工程學系
教授
專長
絕緣層矽晶 (SOI) 材料
晶圓鍵合科學與技術
化學機械拋光
薄膜轉移 - 離子切製程 - 智切法
多孔矽科學與技術
半導體電化學
微波材料製程
碳化矽材料製程優化
Silicon on Insulator (SOI) Materials
Wafer Bonding Science and Technology
Chemical Mechanical Polishing
Layer Transfer - Ion-Cut Process - Smart-Cut Process
Porous Silicon Science and Technology
Semiconductor Electrochemistry
Microwave Materiał Processing
Optimization of Silicon Carbide Material Process
專長簡述
半導體晶圓鍵合科學與技術、單晶薄膜轉移、奈米矽晶、多孔矽、矽光子
最高學歷
美國Duke University
機械(與)材料工程系
博士
科技部學門領域
政府GRB研究專長領域
教育部學門領域
國科會計畫統計
-
鑽石薄膜基板之自由基拋光技術研究
1150801~1160731
-
矽晶深冷陽極氧化的研究與應用:矽量子點的製作
1150801~1160731
-
矽晶深冷陽極氧化的研究與應用:矽量子點的製作
1140801~1150731
-
鑽石薄膜基板之自由基拋光技術研究
1140801~1150731
-
形成暫時性異質接面在半導體基板正表面以強化其背面電化學反應之研究
1130801~1140731
[碳化矽,第三類半導體,快速電化學反應,暫時性異質接面,表面陽極氧化,導電塑膠,晶圓鍵合,氟化石墨烯,量子點,元件基板,軟質材料 , Silicon Carbide,Type III Semiconductors,Rapid Electrochemical Reaction,Temporary Heterojunction,Surface Anodization,Conductive Polymers,Wafer Bonding,Fluorinated Graphene,Quantum Dots,Device Substrate,Soft Materials] -
在重摻雜N型半導體或高純度矽晶材料中轉換介面壁壘型態使電洞流為主控電流,以進行表面陽極氧化合成奈米結構
1120801~1130731
[電化學,陽極氧化,PN 結,奈米結構 , Electrochemistry,Anodization,PN junction,Nanostructure] -
在重摻雜N型半導體或高純度矽晶材料中轉換介面壁壘型態使電洞流為主控電流,以進行表面陽極氧化合成奈米結構
1110801~1120731
[電化學,陽極氧化,PN 結,奈米結構 , Electrochemistry,Anodization,PN junction,Nanostructure] -
科研創業計畫:SiC第三類半導體晶圓材料快速薄化
1110701~1120630
[碳化矽,晶圓薄化,電化學,100奈米,殘留應力,陽極氧化 , silicon carbide,wafer thinning,electrochemistry,100 nm,residual stress,anodization] -
整合電化學及微波化學原理開發綠色高性能薄化與拋光製程
1100801~1110731
[拋光 ] -
基於矽光子技術之快速多模組醫學檢測研發與應用(4/4)
1100801~1110731
[微流道,晶圓鰎合 , Microfluids,wafer bonding] -
在重摻雜N型半導體或高純度矽晶材料中轉換介面壁壘型態使電洞流為主控電流,以進行表面陽極氧化合成奈米結構
1100801~1110731
[電化學,陽極氧化,PN 結,奈米結構 , Electrochemistry,Anodization,PN junction,Nanostructure] -
基於矽光子技術之快速多模組醫學檢測研發與應用--基於矽光子技術之快速多模組醫學檢測研發與應用(3/4)
1090801~1100731
[矽光子技術 ] -
研究由蕭特基勢壘在電化學中的電荷積累效應以開發出無光源陽極化N型矽技術
1090801~1100731
[奈米矽晶,多孔矽,電化學蝕刻,晶圓鍵合,蕭特基接面 , Silicon Nanocrystals,Porous Silicon,Electrochemical Etching,Wafer Bonding,Schottky Junction] -
基於矽光子技術之快速多模組醫學檢測研發與應用--基於矽光子技術之快速多模組醫學檢測研發與應用(2/4)
1080801~1090731
-
研究由蕭特基勢壘在電化學中的電荷積累效應以開發出無光源陽極化N型矽技術
1080801~1090731
[奈米矽晶,多孔矽,電化學蝕刻,晶圓鍵合,蕭特基接面 , Silicon Nanocrystals,Porous Silicon,Electrochemical Etching,Wafer Bonding,Schottky Junction] -
深冷電化學在矽基板上合成奈米晶之研究
1070801~1080731
[多孔矽, 矽奈米晶, 深冷電化學蝕刻, 光致發光, 自由載流體吸收, 矽光子積體 , porous silicon, silicon nanocrystals, cryo-electrochemical etching, photoluminescence, free carrier absorption, silicon photonics] -
基於矽光子技術之快速多模組醫學檢測研發與應用-基於矽光子技術之快速多模組醫學檢測研發與應用(1/4)
1070801~1080731
-
低溫光電化學直接在矽基板上合成奈米晶之研究
1060801~1070731
-
以對稱鍵合結構抵銷熱應力實現異質材料晶圓鍵合及薄膜轉移之研究(II)
1050801~1060731
-
以對稱鍵合結構抵銷熱應力實現異質材料晶圓鍵合及薄膜轉移之研究
1040801~1050731
[熱應力消除,直接鍵合,晶圓鍵合,智切法,在矽基板上砷化鎵薄膜 , Wafer Bonding,Smart-Cut process,GaAs on Si,Direct Wafer Bonding,Thermal StressesCancelation]
產學合作計畫統計
-
半導體穿孔技術製程與機械製造營運計畫
1150101~1151231
[穿透矽通孔製程 , Through-Silicon Via, TSV] -
表面氫鍵晶圓接合技術研究
1110301~1111130
[氮化鋁基板,碳化矽基板,晶圓鍵合,表面處理;,氫鍵 , aluminum nitride substrate,silicon carbide substrate,wafer bonding,surface treatment,hydrogen bonding] -
凡得瓦力晶圓鍵合技術研究
1100201~1101130
[晶圓鍵合,電漿活化,機械化學拋光 , wafer bonding,plasma activation,chemical mechanical polishing] -
全方位SOI基板製作之研究 I:RF-SOI
1091101~1101231
[晶圓鍵合,射頻絕緣層矽晶基板,智切法製程 , wafer bonding,radio-frequency silicon on insulator substrate,Smart-Cut processing]
期刊著作
-
Activating AlN/AlN Surfaces for Low-Temperature Ceramic Bonding: Argon or Oxygen Plasma?
Surfaces and Interfaces, 8, 108654, 2026-03-15
[ Activating AlN/AlN Surfaces for Low-Temperature Ceramic Bonding: Argon or Oxygen Plasma? ] -
Dry-Ice-Bath Anodization of Heavily Boron-Doped Silicon: A Physically Controlled Process for Creating Quantum-Confined Nanostructures
Materials and Design, 263, 115617, 2026-02-03
[ low-temperature anodization,heavily doped silicon,porous silicon,quantum confinement ,photoluminescence (PL) ,nanostructuring ] -
Altering the Fluorination Anodization Pathway of Silicon near an Electrolyte Freezing Point Promotes the Formation of Blue-Photoluminescent Microstructures
ACS applied materials & interfaces, 2026-01-29
[ Cryogenic Treatment, Fluorination, Nanostructure, Silicon Photonics, Photoluminescence (PL) ] -
Quasihomogeneous wafer bonding for fusing dissimilar materials via nanoscale homogenization layer deposition
Materials Today Nano, 30, 2025-06-01
[ Aluminum nitride,Dangling bonds,Heterogeneous wafer bonding,Hybrid bonding,Nanoscale surface effect,Silicon carbide ] -
Nonthermal Effect of Microwave Processing Enhances Interface Reactivity and Microchannel Integrity: Low-Temperature Rapid Bonding of PMMA Microfluidic Devices
ACS Omega, 10, 8, 7662-7671, 2025-03-04 -
Fabrication of a Three-Dimensional Microfluidic System from Poly(methyl methacrylate) (PMMA) Using an Intermiscibility Vacuum Bonding Technique
Micromachines, 15, 4, 2024-04-01
[ digital photoelasticity analysis,intermiscibility bonding technique,microfluidic chip fabrication,PMMA bonding,solvent miscibility ] -
Low-temperature rough-surface wafer bonding with aluminum nitride ceramics implemented by capillary and oxidation actions
Ceramics International, 48, 6, 8766-8772, 2022-03-15
[ Aluminum nitride,Capillary action,Plasma activation,Wafer bonding ] -
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing
Journal of Micromechanics and Microengineering, 31, 5, 2021-05-01
[ Bonding,H2O plasma linked with RTA treatment,Microfluidic device,PMMA ] -
Fusion bonding of copper and silicon at -70 °C by electrochemistry
Acta Materialia, 204, 2021-02-01 -
Utilization of low wavelength laser linking with electrochemical etching to produce nano-scale porous layer on p-type silicon wafer with high luminous flux
ECS Journal of Solid State Science and Technology, 10, 1, 2021-01-01 -
Forming a photoluminescent layer on another surface in the dark through lasering of N-type silicon in an electrolyte
ACS Omega, 5, 41, 26497-26503, 2020-10-20 -
Photoluminescent or blackened silicon surfaces synthesized with copper-assisted chemical etching: For energy applications
ECS Journal of Solid State Science and Technology, 9, 2, 2020-01-17 -
Annihilating Pores in the Desired Layer of a Porous Silicon Bilayer with Different Porosities for Layer Transfer
Scientific Reports, 9, 1, 2019-12-01 -
A fully encapsulated piezoelectric-triboelectric hybrid nanogenerator for energy harvesting from biomechanical and environmental sources
Express Polymer Letters, 13, 6, 533-542, 2019-06-01
[ Nanomaterials , NFES , NMF , PTHG , PVDF ] -
Near-field electrospun piezoelectric fibers as sound-sensing elements
Polymers, 10, 7, 2018-06-21
[ Electrospun , Near-field , Piezoelectric fibers ] -
Rapid Fabrication of 100 nm or Thinner Fully Depleted Silicon-on-Insulator Materials for Ultralow Energy Consumption
ACS Applied Nano Materials, 1, 5, 2414-2420, 2018-05-25
[ FD-SOI , hydrogen enhancement , ion-cut process , layer transfer , solid-phase epitaxial-growth process , ultralow energy consumption ] -
Communication—effect of free-carrier absorption on an anodized silicon surface for producing dense and uniform nanocrystals
Journal of the Electrochemical Society, 165, 3, H99-H101, 2018-01-01
[ Porous Silicon,Photoluminescence,Nanocrystal ] -
Nanoscale layer transfer by hydrogen ion-cut processing: A brief review through recent U.S. patents
Recent Patents on Nanotechnology, 11, 1, 42-49, 2017-01-01
[ Hydrogen ion implantation,Ion-cut process,Layer splitting,Layer transfer,Nanomembrane,Silicon on insulator,Wafer bonding ] -
Communication—eliminating thickness measurement uncertainty of capacitive displacement sensor in high resistivity substrate by photoconduction
ECS Journal of Solid State Science and Technology, 6, 5, P323-P325, 2017-01-01 -
Inhibition effect of a laser on thickness increase of p-type porous silicon in electrochemical anodizing
Journal of the Electrochemical Society, 163, 5, H265-H268, 2016-01-01 -
Sharpening Si nanocrystals on the bulk surface by nanoscale electrochemistry through controlling the hole current with the irradiation of near-infrared laser
Journal of the Electrochemical Society, 163, 9, E258-E262, 2016-01-01 -
Modeling a thermionic energy converter using finite-difference time-domain particle-in-cell simulations
Physics of Plasmas, 21, 2, 2014-02-01 -
Increasing more bonding energy in nitrogen plasma-activated wafer bonding by HF-dip
ECS Electrochemistry Letters, 3, 8, 2014-01-01 -
Increasing more bonding energy in nitrogen plasma-activated wafer bonding by HF-Dip
ECS Solid State Letters, 3, 8, 2014-01-01 -
Effect of microwave processing on oxygen plasma-assisted bonding enabling rapid layer transfer
ECS Solid State Letters, 3, 1, 2014-01-01 -
HF/H2 O2 etching for removal of damage layer on as-transferred Si layer formed by ion-cut process
Electrochemical and Solid-State Letters, 13, 7, 2010-09-07 -
Low stress silicon layer transfer onto quartz through hydrogen capture within Si (B/Ge) Buried Layer
Electrochemical and Solid-State Letters, 12, 12, 2009-10-22 -
Oxidation behavior of various metallic alloys for solid oxide fuel cell interconnect
Journal of Fuel Cell Science and Technology, 6, 3, 0310131-0310136, 2009-08-01
[ Interconnect , Oxide scal , Solid oxide fuel cell (SOFC) ] -
Performance evaluation of LSM-metallic interconnect composite films prepared by plasma sputtering method
Materials Science and Technology, 25, 5, 582-586, 2009-05-01
[ Fe-Cr alloy , Interconnect , Solid oxide fuel cell (SOFC) ] -
Oxidation behavior of metallic interconnect coated with La-Sr-Mn film by screen painting and plasma sputtering
International Journal of Hydrogen Energy, 34, 1, 422-434, 2009-01-01
[ Interconnect , Plasma-sputtering coating , Screen painting , Solid oxide fuel cell (SOFC) ] -
Nanoscale thick layer transfer of hydrogen-implanted wafer by using polycrystalline silicon sacrificial layer
Applied Physics Letters, 91, 20, 2007-11-23
[ wafer bonding,Silicon on Insulator,Smart-Cut Processing,Layer Transfer ] -
Fabrication of a nanoscale single-crystalline silicon thin film on insulator
Electrochemical and Solid-State Letters, 10, 7, 2007-05-21 -
Ammonium hydroxide effect on low-temperature wafer bonding energy enhancement
Electrochemical and Solid-State Letters, 8, 3, 2005-04-07 -
Wafer bonding for microsystems technologies
Sensors and Actuators, A: Physical, 74, 1, 161-168, 1999-04-20 -
Onset of blistering in hydrogen-implanted silicon
Applied Physics Letters, 74, 7, 982-984, 1999-02-15 -
Fundamental issues in wafer bonding
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 17, 4, 1145-1152, 1999-01-01 -
A "smarter-cut" approach to low temperature silicon layer transfer
Applied Physics Letters, 72, 1, 49-51, 1998-12-01 -
Si and SiC layer transfer by high temperature hydrogen implantation and lower temperature layer splitting
Electronics Letters, 34, 4, 407-408, 1998-02-19 -
Low vacuum wafer bonding
Electrochemical and Solid-State Letters, 1, 1, 52-53, 1998-01-01 -
Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates
Applied Physics Letters, 70, 11, 1390-1392, 1997-03-17 -
The role of surface chemistry in bonding of standard silicon wafers
Journal of the Electrochemical Society, 144, 1, 384-389, 1997-01-01 -
Fabrication of single crystalline SiC layer on high temperature glass
Journal of the Electrochemical Society, 144, 5, 1997-01-01
研討會著作
-
Electrochemical Weakening Material Strength for Accelerated Thinning of Silicon Carbide Substrates
2024-05-29
[ silicon carbide,electrochemical etching ] -
Low-Temperature Anodization: An Electrochemical Route to Tailored Nanostructures in Heavily Doped p-Type Silicon for Forming Quantum Dots
2024-05-29
[ porous silicon,quantum dots,low temperature anodization ] -
Low Temperature Wafer Bonding of Silicon Carbide/Aluminum Nitride
2023-05-30
[ wafer bonding, aluminum nitride, silicon carbide, plasma activation ] -
Low-Temperature Rough-Surface Wafer Bonding with AlN/AlN Via Oxygen Plasma Activation
49-50, 2022-01-01
-
Measurement of thickness of high-resistivity substrate by photoconduction enhanced capacitance displacement sensor
1747-1752, 2017-01-01
[ ] -
Free-carrier absorption assisted photoelectrochemistry of silicon
1113-1125, 2017-01-01
[ ] -
The suppression effect of 830 nm laser irradiation on porous silicon formation
1-7, 2015-01-01
[ ] -
Enhancement of bonding strength for low temperature Si3N4/Si3N4 direct wafer bonding by nitrogen-plasma activation and hydrofluoric pre-dip
111-117, 2014-01-01
[ ] -
Layer transfer of hydrogen-implanted silicon wafers by thermal-microwave co-activation
111-116, 2006-01-01
[ ] -
Nanothick layer transfer of hydrogen-implanted wafer using polysilicon sacrificial layer
84-89, 2006-01-01
[ ] -
A nano-thick SOI fabrication method
431-438, 2005-12-01
[ ] -
Thermal-microwave hybrid SOI materials technology
414-423, 2005-12-01
[ ]
校外榮譽
- 113 [經濟部] 2023台灣創新技術博覽會發明競賽
- 113 [經濟部] 2024 台灣創新技術博覽會發明競賽金牌獎
- 113 [國家科學及技術委員會] 2024未來科技獎
- 112 [經濟部] 2023台灣創新技術博覽會發明競賽
- 112 [國家科學及技術委員會] 2023未來科技獎
- 111 [科技部] 2022未來科技獎
校內獲獎
- 115 研究傑出獎
- 114 研究傑出獎
- 113 研究傑出獎
- 112 研究傑出獎
- 112 優良產學貢獻獎
- 111 研究傑出獎
著作審查:
-
112 ~ 112
Surfaces and Interfaces
ISSN 2468-0230 EISSN 2468-0230
審查稿件:Manuscript Number: SURFIN-D-23-00923 -
111 ~ 111
Materials Today Nano
EISSN 2588-8420
審查稿件:MTNANO-D-22-00915 -
111 ~ 111
Materials Today Nano
EISSN 2588-8420
審查稿件:MTNANO-D-22-00895
- 半導体基板の処理方法 [日本]
- 材料表面處理設備、材料表面處理方法以及碳化矽材料表面處理方法 [中華民國]
- 碳化矽基板或基板處理方法 [中華民國]
- 材料表面處理設備、材料表面處理方法以及碳化矽材料表面處理方法 [日本]
國立中央大學